Rotatable Sputter Targets

Bekaert is a leading supplier of rotatable sputter targets that are manufactured by thermal spraying of materials.

Thermal Sprayed Sputter Target Materials

Material	Symbol
Aluminum	Al
Chrome	Cr
Cobalt	Co
Molybdenum	Mo
Nickel Chrome	Ni Cr
Silicon	Si Si Al
Tin	Sn
Titanium Oxide	TiOx
Zinc	Zn Zn Al Zn Sn

Other materials are currently under development.

Extruded Sputter Target Materials

Material	Symbol
Titanium	Ti

Application Fields

Reactive sputter deposition of these materials allows the formation of easy and self cleaning coatings low-e and solar control films electrically conductive coatings smart coatings (electro-, photo- and thermochromic) anti-reflective coatings ...

Sputter Target Sizes

QCT C-Mag Model Nr.	Target Length (mm)	Target Length (Inch)
1670	849	33.4
2000	1007	39.65
2300	1185	46.65
3000	1363	53.43
3900	1794	70.63
4500	2124	83.62
5100	2429	95.63
5300	2651	104.38
6000	2886	113.62
6200M	3191	125.63
7200	3440	135.43
7300	3559	140.13
7400M	3852	151.65

Typical dimensions oh these tubes are 5'' ID for glass coating and 7.6'' ID for web coating.

Advantages of Thermal Sprayed Rotatable Targets

• Alloys are available in all stoecheometric concentrations independent of the phase diagrams
• Long-life (dog bone shaped) targets can be sprayed

Rotatable sputter targets with standard magnet bars have a somewhat faster erosion at the extremities due to the racetrack turnaround.

By increasing the material thickness at both ends, target material utilisation of about 90% can be achieved with most materials.

Contact us if you would like to receive the PDF leaflet on rotatable targets.