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Rotatable sputter targets

Advantages

  • Lower Cost of Ownership thanks to the advantages of rotatable technology (more material inventory, higher utilization grade, better cooling & higher stability)
  • High volume of locally produced targets of all sizes, all shapes and with all existing fixations
  • Wide range of materials available (Al, AZO, Cr, ITO, Mo, Nb, NiCr, High purity Si, SiAl, Sn, Ti, Tiox, TiOx/Nb, Zn (Al), Zn (Sn), custom made alloys, etc.)
  • Different production methods: thermal spraying and extrusion

Product description

Glass coater
© Bekaert

Rotatable sputter targets are used in PVD processes, for both horizontal and vertical applications.

 

 

 

By combining the rotatable targets with our sputter hardware, an improved value creation model can be achieved (longer production runs, faster coating deposition, higher coating material utilization, etc.).
Custom-made solutions through partnerships with customers are developed to reach the required layer properties and to maximize sputter efficiency (in terms of target utilization and sputter yield).

Technological features

  • Surface
  • Hydrophilic
  • Hydrophobic
  • Biological
  • Biodegradable
  • Anti-fouling
  • Electric and magnetic
  • Electrically conductive
  • Electrically isolating
  • Optical
  • Reflective coating
  • Photoluminescent coating
  • Electroluminescent coating
  • Photochromic coating

Applications

  • Photovoltaics: transparent conductive oxides and back reflectors
  • Flat panel display: metals for interconnects and transparent conductive oxides
  • Optical coatings
  • Electrochromic coatings
  • Webcoatings

better together

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Situation

Request for close contact with and tailor-made advice from Bekaert.

Solution

Bekaert teams visit customers’ plants to check on how our product is performing.

Result

Close to our steel cord customers, literally and figuratively.

Bekaert events

First upcoming event

20-Apr-2010 to 21-Apr-2010

  • What
    SVC
  • Where
    Orlando, Florida, USA

Business news

Bekaert introduces one-piece rotatable AZO targets at Intersolar North America 2009

17-Jun-2009
Summary
Faster and cheaper deposition of TCO layers for photovoltaic applications through new rotatable sputter target – demonstration on booth 7413